Varian HS-20
| Pumping Speed: | 17,500 liters/sec Air |
| Operating Range: | 8X10-4 to 5X10-8 torr |
| Warm Up Time: | 45 minutes |
| Cool Down Time: | 85 minutes |
| Fluid Charge: | 5 quarts (4.7 l;iters) |
| Electrical Requirements: | 480 Volts, 50/60 Hz, 3 Phase |
| Pump Power: | 12,000 watts |
| Cooling Water Requirements | 1.5 gallons / minute (300 liters/hr) |